Characterization of atomic layer deposited and sputtered yttria-stabilized zirconia thin films for low-temperature solid

Waqas Hassan Tanveer, Sanghoon Ji, Wonjong Yu, Gu Young Cho, Yoonho Lee, Suk Won Cha

20141106 ~ 20141107

2014 한국수소및신에너지 추계학술대회