International ConferenceProperties of ZrO2 thin films prepared by plasma enhanced atomic layer deposition at low temperature Cho Gu Young, Noh Seungtak, Kim Donghyun, Lee Yoonho, Ji Sanghoon, Hong Yongtaek, Cha Suk Won 20140715 ~ 20140718 Thin Film 2014 – Chongqing, China