On the reduced electrical conductivity of radio-frequency sputtered doped ceria thin film by elevating the substrate temperature

Sanghoon Ji, Jihwan An, Dong Young Jang, Youngseok Jee, Joon Hyung Shim, Suk Won Cha

Abstract

The electrical conductivity of ~200 nm-thick gadolinium-doped ceria (GDC) thin films deposited at various substrate temperatures by radio-frequency sputtering was evaluated in a temperature range of 400 ℃-550 ℃ as an electrolyte for solid oxide fuel cells operated at low temperatures. Morphological, chemical, and crystalline properties were discussed to determine the electrical conductivity; in particular, the electrical conductivity of GDC thin film deposited at 300 ℃ was appreciably lower than that of GDC thin film deposited at 150 ℃. The columnar grain boundaries and the reduced ceria formed during the sputtering process are considered as the major factors leading to the measured results.