고체 산화물 연료전지를 위한 SrCo0.8Nb0.1Ta0.1O3-δ 공기극 펄스레이저 증착

류상봉1, 유원종, Arunkumar Pandiyan, 이상훈, 정원엽, 최인원, 이명석, 차석원

Abstract
Recently, new perovskite cathode material, SrCo0.8Nb0.1Ta0.1O3-δ (SCNT) was reported, showing high oxygen reduction reaction (ORR) activity. This study demonstrates thin film deposition of SCNT by pulsed laser deposition technique applied to anodic aluminum oxide (AAO) based thin-film solid oxide fuel cells (TF-SOFCs) to assess the possibility of SCNT application to TF-SOFCs. The SCNT powder and the target were prepared by the solid state reactive sintering method (SSRS). This target was then mounted to the pulsed laser depositing machine and deposited on the Si wafer, and the nano-porous substrate, AAO. The physical structure and the chemical phase were investigated by the field emission scanning electron microscope, focused ion beam scanning electron microscope, and X-ray diffraction. On the top of the AAO, thin Pt film and yttria stabilized zirconia (YSZ) were first deposited by sputtering and the SCNT was deposited on the top of it afterward. The open circuit voltage of AAO cell was tested at 500°C, and successful polarization activity of SCNT was observed.