International ConferenceCharacterization of atomic layer deposited and sputtered yttria-stabilized zirconia thin films for low-temperature solid Waqas Hassan Tanveer, Sanghoon Ji, Wonjong Yu, Gu Young Cho, Yoonho Lee, Suk Won Cha 20140715 ~ 20140718 Thin Film 2014 – Chongqing, China