Influence of target to substrate distance on properties of Y-doped BaZrO(3)Thin films grown by pulsed laser deposition

This paper investigates the optimum deposition condition of yttrium-doped barium zirconate (BZY) through a change in the target-substrate distance (TSD), one of the most important parameters in pulsed laser deposition, by conducting an analysis of the crystal structural and morphological properties of BZY thin films. As the TSD increases, the grain size of the BZY particle increases and the surfaces of BZY thin films show a tendency to be porous. The deposition rate also decreases. As TSD decreases, on the other hand, the crystal structure of BZY thin films becomes more crystalline and the deposition rate gradually increases, and the deposition rate decreases instead in case TSD is shorter than the length of the plume.

Junyeol Paek, Ikwhang Chang, Minhwan Lee, Sanghoon Ji, Suk Won Cha