Effect of Microstructure Control of Thin Film Yttria Stabilized Zirconia Electrolyte for Solid Oxide Fuel Cells by Adjusting Oblique Angle and Target Substrate Distance of Sputtering Process
S.Lee, W.Yu, G.Y.Cho, S.W.Cha
20190908 ~ 20190913
16th International Symposium on Solid Oxide Fuel Cells (SOFC-XVI)