장소: 대만, Tainan
개최일정: 2015. 11. 15 – 18
주관기관: National Cheng Kung University
- 발표논문명: Preparation and Characterization of ZrO2 Thin Film via Direct Plasma Enhanced Atomic Layer Deposition at Low Temperature
저자명: Gu Young Cho, Seungtak Noh, Donghyun Kim, Yoon Ho Lee, Yongtaek Hong, Jihwan An, Suk Won Cha
발표형태: 포스터
발표일자: 2015. 11. 17